A fully automatic doublesided test system for Si microstrip detectors

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A fully automatic double-sided test system for Si microstrip detectors ... Currently with Agilent SA -Milano. 17-18 May, 2001. 1st Workshop on QA of Silicon Detectors ...
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Title: A fully automatic doublesided test system for Si microstrip detectors 1 A fully automatic double-sided test system for Si microstrip detectors
  • P. Weiss - S. Tritto - R. Della Marina
  • Colibrys SA
  • Currently with Agilent SA -Milano
  • 2 Requirements for Industrial Testing
  •  "High" speed
  • Low Manpower
  • gt Automatic testing
  • gt Simple specifications
  • gt Focussed testing
  • gt Constraints on pad design
  • Data management
  • 3 Standard Equipment
  • Prober aspects (Electroglass EG2001ECX)
  • Backside damage control
  • Handling parts conditioning and qualification
  • Passivated wafers
  • Adapted chuck
  • Electrical contact
  • Safety
  • Tester aspects (Keithley S450UX)
  • High voltage source (Keithley 237)
  • 1 pin -gt 1000 V gt 1 current measurement!
  • CVmeter (HP4284)
  • No significant harware modifications !!!
  • 4 SS AC - like MSD test (CMS) 12h/lot )25 wafers 5 DS DC - like MSD test (AMS) 4h/(sidelot) 6 Design Considerations
  • Pad size
  • 60 mm x 250 mm recommended
  • Pad placing
  • Aligned
  • Equally spaced, as a rule
  • Fan devices can be handled with some precautions
  • Biasing
  • Long bias ring contact
  • To Be Checked and Accepted!!!
  • 7 Testable Pads 8 Double-Sided Biasing
  • For the p-side, from the top
  • Takes advantage of n-type  "channel" implant
  • For the n-side, from an locally conducting chuck
  • Implies some constraints on the p-side design
  • No adjustable part on chuck
  • No "live" chuck
  • 9 Test biasing 10 p-Side Designfor n-side biasing 11 Pad Scratching
  • Possible on the prober
  • Complex programming(  "cheat" the system)
  • Supplementary handling
  • Large enough pads!
  • KISS
  • 12 Conclusions
  • Automatic DS testing on an industrial machine is possible
  • Typical testing times are 8 12 h/lot
  • Industry will not adapt the tester to the layout, so adapt the layout to the tester!
  • 13 CSEM Automatic MSD Test System (II)
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